Cleaning high quality zerodure substrates for multilayer optical coatings

Problem:
Zerodur optical substrates that will have multiple optical coatings applied require the removal of particles, contaminants, soils to assure proper coating and coating performance.

Solution:
To clean the zerodur substrates clean in warm (circa 50-55 deg C) 1% Liquinox in an ultrasonic bath followed by a thorough rinse in high purity water, preferably deionized or reverse-osmosis water.

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